Laser array micro-pore forming device and method

[0021] As shown in Figure 3, a laser array microhole forming device includes: high repetition rate, ultrashort pulse ultraviolet solid-state laser 1, laser beam generator 2, collimating beam expander 3, shutter 4 (laser energy controller ), the beam positioning and scanning device 5 is composed of an XY beam positioning scanner 10, a telecentric f-theta scanning focusing objective lens 11, a CCD vision alignment system 6, an XYZ (liftable) precision displacement work platform 7, a vacuum negative pressure Adsorption film rack 8, array of microporous workpieces 9.

[0023] As shown in Figure 4, the laser array micro-hole forming device includes: a high repetition rate, ultra-short pulse ultraviolet solid-state laser 1, laser beam generator 2, collimating beam expander 3, shutter 4 (laser energy controller ), the beam positioning and scanning device 5 is composed of an adjustable aperture rotating beam generator 12, a focal plane automatic tracking and focusing objective lens 13, a CCD vision alignment system 6, an XYZ (liftable) precision displacement work platform 7, a vacuum negative pressure Adsorption film rack 8, array of microporous workpieces 9.

[0024] 1. Using telecentric f-theta focus scanning objective lens:

[0025] Set the required hole diameter, hole spacing and hole type parameters of the probe card array microplate, and make computer-controlled processing files: According to the required hole diameter, hole spacing, coordinate position and hole type parameters of the probe card array microplate , To form the control data file...