Magnetic sensor and manufacturing method thereof
The technology of a magnetic sensor and manufacturing method, which is applied in the field of magnetic sensors, can solve problems such as troublesome manufacturing of magnetic sensors, and achieve the effect of reducing the change of magnetic field
Inactive Publication Date: 2008-10-22
YAMAHA CORP
View PDF3 Cites 25 Cited by 
- Summary
 - Abstract
 - Description
 - Claims
 - Application Information
 
 AI Technical Summary 
Problems solved by technology
This can cause trouble in the manufacture of magnetic sensors
Method used
 the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine 
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
 Experimental program 
 Comparison scheme 
 Effect test 
Embodiment Construction
 the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine 
 Login to View More PUM
 Login to View More Abstract
This invention discloses a magnetic sensor and manufacturing method thereof. The magnetic sensor includes a plurality of giant magnetoresistance components, each of which includes a free layer, a conductive layer and a fixing layer orderly laminated on the substrate, wherein the fixing layer is formed by orderly laminating a first magnetic layer, a Ru layer, a second magnetic layer and an anti-ferromagnetic layer; a magnetizing heat treatment is carried out to fix the magnetizing direction of the fixing layer. The thickness magnetic moments of the first and second magnetic layers are different from each other; the thickness of the Ru layer is in the range of four to ten. The magnetocaloric treatment is carried out to maintain a anti-parallel state between the first and second magnetic layers. A giant magnetoresistance component is formed by using a plane surface and the others are formed by using corresponding slope on the substrate so as to detect a magnetic field along three axial directions. According to this invention, it is easily to control the magnetizing direction of the fixing layer in the heat treatment.
Description
Magnetic sensor and manufacturing method thereof   technical field   The present invention relates to a magnetic sensor, each of which includes a plurality of giant magnetoresistive elements formed on a single substrate to detect magnetic field density (or magnetic field strength) in biaxial or triaxial directions.  The invention also relates to a method of manufacturing a magnetic sensor.   Background technique   As elements for magnetic sensors, giant magnetoresistance elements (GMR elements) and tunnel magnetoresistance elements (TMR elements) are conventionally known.  Each conventionally known magnetoresistive element comprises a pinned layer whose magnetization direction is pinned (or fixed) and a free layer whose magnetization direction changes in response to an external magnetic field, wherein the magnetoresistive element exhibits a magnetization suitable for the pinned layer.  orientation and the correlation between the orientation of the magnetization of the free layer and...
Claims
 the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine 
 Login to View More Application Information
 Patent Timeline 
 Login to View More  Patent Type & Authority Applications(China)
IPC IPC(8): G01R33/09
CPCG01R33/093H01L43/12B82Y25/00H10N50/01
 Inventor 相曾功吉
 Owner YAMAHA CORP
Features
- R&D
 - Intellectual Property
 - Life Sciences
 - Materials
 - Tech Scout
 
Why Patsnap Eureka
- Unparalleled Data Quality
 - Higher Quality Content
 - 60% Fewer Hallucinations
 
Social media
Patsnap Eureka Blog
 Learn More Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com
