Micro-measurement Force Aiming Sensor Based on Co-spherical Coupling of Three Optical Fibers

The invention provides a micro-measuring-force aiming sensor based on three-optical-fiber ball-sharing coupling and belongs to the technology of manufacturing and measurement of precise instruments. The sensor comprise a laser, a beam expanding and collimating mirror, an optical fiber coupling lens, a guide tube, a microscope objective b, a CCD camera b, a microscope objective a, a CCD camera a, a computer and a probe, wherein the probe is composed of an incidence optical fiber, a coupler, an emergent optical fiber a and an emergent optical fiber b. The coupler is used as a contact of the probe. A light beam is guided into the coupler through the incident optical fiber and then guided out through the emergent optical fiber a and the emergent optical fiber b, the light beam which is guided out enters the CCD camera a and the CCD camera b via the microscope objective a and the microscope objective b, and the central positions of energy of light spots formed by two emergent light beams respectively on the CCD cameras can be obtained through an image processing technology. The aiming condition on space of the sensor can be obtained according to the one-to-one corresponding relation between the central positions of energy of the light spots on the CCD cameras and the spatial positions of contact detected points of the sensor. The sensor is large in detectable depth-diameter ratio and has the three-dimension detection ability.