Low energy big flow and strong irradiation device for materials
A technology of irradiation device and current intensity, which is applied in the field of low-energy and high-current intensity irradiation devices, and can solve the problems that the design of low-energy and high-current intensity material irradiation devices has not yet been reported.
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[0027] The present invention will be further described below in conjunction with the drawings and specific embodiments.
[0028] A device for irradiating materials with low energy and high current, used to generate high-density plasma, such as figure 1 As shown, it includes an air intake system, an air pressure monitoring device 2, a plasma generation system, a sample stage 13, a laser heating system 6, a temperature measurement system 9, a vacuum pumping system 5, a water cooling cycle system 4, and a power supply system;
[0029] The air intake system is composed of air source 1 and digital DIP control system 3;
[0030] The plasma generation system includes a Faraday water cooling screen 14, a high-purity quartz barrel 12, an RF external antenna 11, a PTFE protective shell 10, a grid suppression magnet 15 and an ion extraction system;
[0031] The Faraday water-cooled screen 14 is made of metal materials with low sputtering rate and high thermal conductivity such as full metal molyb...
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