Fully-automatic optical element cleaning device with ultrasonic-megasonic composite frequency

The invention discloses a fully-automatic optical element cleaning device with an ultrasonic-megasonic composite frequency. The ultrasonic-megasonic composite frequency covers low / intermediate / high ultrasonic frequencies and low / intermediate / high megasonic frequencies. Particularly, an appropriate program and process parameters are selected to aim at super-clean washing requirements for an optical element, and pollutants from a micron scale to a nanometer scale on the surface of the optical element can be effectively removed. The fully-automatic optical element cleaning device with the ultrasonic-megasonic composite frequency has the main characteristics that an ultrasonic solution soaking cleaning tank, a megasonic cleaning tank and a spraying tank are designed; different frequency ultrasonic and megasonic waves are adopted, and cleaning requirements from a micron size to a nanometer size are covered; a workpiece is driven by a cylinder to reciprocate up and down in a tank body, a wave node of a standing wave field is prevented from being generated in a fixed area of the surface of the workpiece by virtue of a frequency sweeping function of an ultrasonic-megasonic generator, and the surface damage is avoided; the tank body adopts overflow cycle heating filtration; the total length of an overflow front edge is increased by using a trapezoidal saw-tooth type overflow edge design to obtain uniform and stable overflow; an inclined workpiece clamping device cooperates with an air knife and a slow lifting mechanism to dry the workpiece.