An implementing mode of the invention provides an improved technology for depositing materials containing 
tungsten. The technology utilizes an infusion technology and a gaseous phase deposition technology, such as 
atomic layer deposition (ALD), to provide 
tungsten-containing materials with obviously improved surface evenness and yield. In one implementing mode, a method for forming 
tungsten-containing materials on a substrate is provided. The method comprises deposing a substrate, which contains a bottom 
coating deposited thereon, in a technological chamber; exposing the substrate orderly in a precursor of tungsten and reducing gases so as to deposit a tungsten 
nucleation layer on the bottom 
coating, during the ALD technology; and depositing a tungsten 
block layer on the tungsten 
nucleation layer. The invention is characterized in that the reducing gases comprise a 
hydrogen gas / 
hydride flow ratio of 40:1, 100:1, 500:1, 800: 1, 1000:1 or more, and comprise 
hydride such as 
diborane, silicane or silicoethane.