420 results about "Radiofrequency coil" patented technology

A magnetron sputter reactor for sputtering deposition materials such as tantalum, tantalum nitride and copper, for example, and its method of use, in which self-ionized plasma (SIP) sputtering and inductively coupled plasma (ICP) sputtering are promoted, either together or alternately, in the same or different chambers. Also, bottom coverage may be thinned or eliminated by ICP resputtering in one chamber and SIP in another. SIP is promoted by a small magnetron having poles of unequal magnetic strength and a high power applied to the target during sputtering. ICP is provided by one or more RF coils which inductively couple RF energy into a plasma. The combined SIP-ICP layers can act as a liner or barrier or seed or nucleation layer for hole. In addition, an RF coil may be sputtered to provide protective material during ICP resputtering. In another chamber an array of auxiliary magnets positioned along sidewalls of a magnetron sputter reactor on a side towards the wafer from the target. The magnetron preferably is a small, strong one having a stronger outer pole of a first magnetic polarity surrounding a weaker outer pole of a second magnetic polarity and rotates about the central axis of the chamber. The auxiliary magnets preferably have the first magnetic polarity to draw the unbalanced magnetic field component toward the wafer. The auxiliary magnets may be either permanent magnets or electromagnets.

A method for multi-slice magnetic resonance imaging, in which image data is acquired simultaneously from multiple slice locations using a radio frequency coil array, is provided. By way of example, a modified EPI pulse sequence is provided, and includes a series of magnetic gradient field “blips” that are applied along a slice-encoding direction contemporaneously with phase-encoding blips common to EPI sequences. The slice-encoding blips are designed such that phase accruals along the phase-encoding direction are substantially mitigated, while providing that signal information for each sequentially adjacent slice location is cumulatively shifted by a percentage of the imaging FOV. This percentage FOV shift in the image domain provides for more reliable separation of the aliased signal information using parallel image reconstruction methods such as SENSE. In addition, the mitigation of phase accruals in the phase-encoding direction provides for the substantial suppression of pixel tilt and blurring in the reconstructed images.