The invention provides a large-cavity length micro-electro-mechanical tunable fabry-perot filter. The upper substrate of the filter is composed of bulk 
silicon of which the section is W-shaped after double-sided 
corrosion and a rich 
boron-doped layer on the lower surface of the bulk 
silicon; the upper surface of the W-shaped bulk 
silicon is provided with a transparent thin film as a supporting film; a reflecting film on the supporting film serves as the front cavity mirror of the fabry-perot filter; the rich 
boron-doped layer in different regions of the lower surface of the W-shaped bulk silicon is capable of serving as a 
cantilever beam and an upper 
electrode, respectively. The lower substrate of the filter is made of 
quartz glass; a rear cavity mirror and a lower 
electrode are fabricated on the upper surface of the lower substrate in regions corresponding to the front cavity mirror and the upper 
electrode; a 
diffraction grating is carved in the region, corresponding to the rear cavity mirror, of the lower surface of the lower substrate. The micro-electro-
mechanical filter is capable of obtaining the initial cavity length of more than 200 microns conveniently and capable of realizing single 
wavelength filtering in different directions, has the advantages of narrow half-peak overall width and wide 
free spectral range, and has wide application prospect in the fields of 
optical communication, optical information reading, 
laser technology and the like.